A novel valveless piezoelectric micropump with a bluff-body based on Coanda effect

Based on the Coanda effect, a novel valveless micropump is presented in this paper, the special bluff-body is utilized to enhance the Coanda effect and increase the net flow of the micropump. In order to reveal the influence of structural parameters on the performance of novel micropump, five micropump samples with different chamber radii (5 mm and 9 mm), aspect ratios (4 and 8) and channel angles (30° and 45°) are fabricated by silicon-based MEMS technology. On the conditions of the voltages (50–300 vpp) and excitation frequencies (25–125 Hz), the performance of the micropumps is studied experimentally in detail. As the voltage V = 300 vpp and the frequency f = 50 Hz, the maximum net flow and back pressure for the optimal sample can attain 4.84 ml/min and 1.75 kPa, respectively. Through numerical simulations, the efficiency of the micropumps with different aspect ratios L1/d (3–9) are investigated as Reynolds number range from 300 to 1000 at the frequencies of 5–400 Hz. When the Reynolds number is constant, the pump efficiency has the optimal value with the increase of frequency, and the streamline diagrams indicate that this is related to the effects of the internal vortexes.

[1]  Hyun Gyu Park,et al.  Design and characterization of a passive recycle micromixer , 2003 .

[2]  Young Ho Seo,et al.  Design and fabrication of synthetic air-jet micropump , 2011 .

[3]  Yi Chun Wang,et al.  Loss characteristics and flow rectification property of diffuser valves for micropump applications , 2009 .

[4]  James S. Wilkinson,et al.  Design and theoretical evaluation of a novel microfluidic device to be used for PCR , 2003 .

[5]  Patrick Ruther,et al.  Combination of a fluidic micro-oscillator and micro-actuator in LIGA-technique for medical application , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[6]  Stephanus Büttgenbach,et al.  A multifunction and bidirectional valve-less rectification micropump based on bifurcation geometry , 2010 .

[7]  Yves Fouillet,et al.  A low voltage silicon micro-pump based on piezoelectric thin films , 2016 .

[8]  Piezoelectric micropump for lab-on-a-chip applications , 2009, 2009 International Conference on Microelectronics - ICM.

[9]  D. Chatterjee,et al.  Experimental characterization of piezoelectrically actuated micromachined silicon valveless micropump , 2016 .

[10]  Jens Anders Branebjerg,et al.  Microfluidics-a review , 1993 .

[11]  D. DeVoe,et al.  An electrohydrodynamic polarization micropump for electronic cooling , 2001 .

[12]  Martin A. Afromowitz,et al.  DESIGN, FABRICATION AND TESTING OF FIXED-VALVE MICRO-PUMPS , 1995 .

[13]  E. Sparrow,et al.  Numerical simulations of plane-wall coanda effects for control of fiber trajectories in the melt-blown process , 2013 .

[14]  Juan G. Santiago,et al.  A review of micropumps , 2004 .

[15]  X. Zha,et al.  Study on a piezoelectric micropump for the controlled drug delivery system , 2007 .

[16]  Coanda effect in coastal flows , 2010 .

[17]  Lothar Schmitt,et al.  Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves , 2007 .

[18]  G. Stemme,et al.  A valveless diffuser/nozzle-based fluid pump , 1993 .

[19]  Shouqi Yuan,et al.  Design and experimental study of a novel three-way diffuser/nozzle elements employed in valveless piezoelectric micropumps , 2015 .

[20]  Song Yang,et al.  Design of a Novel Bidirectional Valveless Piezoelectric Micropump With Three Chambers Using Coanda Effect Based on Numerical Simulation , 2014 .

[21]  Walied A. Moussa,et al.  Simulation of MEMS Piezoelectric Micropump for Biomedical Applications , 2002 .

[22]  Liang Xu,et al.  The analysis of internal transient flow and the performance of valveless piezoelectric micropumps with planar diffuser/nozzles elements , 2017 .

[23]  Chunsheng Zhao,et al.  Theoretical analysis and experimental verification on valve-less piezoelectric pump with hemisphere-segment bluff-body , 2014 .

[24]  U. Lei,et al.  A study of PZT valveless micropump with asymmetric obstacles , 2009 .