论文信息 - Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement

Noncontact testing of optical surfaces by multiple-wavelength light scattering measurement

An instrument is described which enables the detection of backscattered light within a wide spectral region. The apparatus is based on a Coblentz sphere and is equipped with light sources from the UV to IR spectral region (248 nm to 10.6 micrometer). Results are reported of measurements on samples with different surface qualities such as supersmooth Si-wafers with sub-angstrom surface roughness, glass substrates, thin film optical components and machined surfaces. The set-up complies with a corresponding ISO project.

Angela Duparre | Stefan Gliech

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