Holographic transmission surface-relief grating couplers for backplane interconnections

Holographic surface-relief diffractive elements with an inclined profile working as transmission grating couplers for backplane interconnects were fabricated and their diffraction efficiency was measured during a step-by-step development process for various orientations with respect to the direction of incident light. The highest diffraction efficiency was achieved for p-polarized light which propagates inside a medium of lower optical density and is outcoupled into a medium of higher optical density.