Micromachined accelerometer with area-changed capacitance
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[1] Christopher J. Kemp,et al. ISAAC: integrated silicon automotive accelerometer , 1996 .
[2] M. Esashi,et al. Three-axis Capacitive Accelerometer With Uniform Axial Sensitivities , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[3] Wolfgang Kuehnel,et al. A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .
[4] F. Rudolf,et al. Precision accelerometers with μg resolution , 1990 .
[5] Khalil Najafi,et al. A high-sensitivity z-axis capacitive silicon microaccelerometer with a torsional suspension , 1998 .
[6] Sato Kazuo,et al. Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique , 1990 .
[7] Robert Puers,et al. Design and processing experiments of a new miniaturized capacitive triaxial accelerometer , 1998 .
[8] Stephen F. Bart,et al. An integrated force-balanced capacitive accelerometer for low-g applications , 1996 .