Sensitive dual sensing system for oxygen and pressure based on deep ultraviolet absorption spectroscopy

Abstract In this study, a highly sensitive monitoring system for dual sensing of oxygen and pressure has been developed. The absorption of oxygen in the wavelength range of 186–196 nm was observed and the corresponding absorption cross-section of oxygen in this band was achieved. An approach based on differential optical absorption spectroscopy was used to describe the concentration of oxygen. The detection limit of oxygen was determined to be 150 ppm per meter. No relation between pressure and oxygen absorption line shape in the related wavelength band was confirmed. Based on the absorption of oxygen, pressure detection was realized and a detection limit of 180 Pa was obtained. A dual sensing system for oxygen and pressure was constructed.

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