Design andSimulation ofSimple andVarying Section Cantilever andFixed-Fixed EndTypes MEMS Switches

This paperreports onthedesign and simulation ofsimple andvarying section cantilever andfixed-fixed endtypesMEMS switches. First theelectromechanical design andsimulation ofsimple cantilever andfixed- fixed endstypeMEMS switches ispresented, andtheeffect ofelectrostatic areaandits location on the switching voltage is investigated. Thenthegoverning equations for spring-constant ofvarying section cantilever andfixed-fixed endtypes MEMS switches is derivedby energymethodand Euler- Bernoulli theory. Theswitching voltage of mentioned constructions forMEMS switches isdetermined by design and simulation methods andtheresults ofthese methods are compared.