Polar-coordinate laser writer for binary optics fabrication

A Laser Writer system for recording centro-symmetric patterns in photoresist has been developed as an alternative method for binary optics mask and component fabrica.- tion.This system is capable of generating binary amplitude patterns with linewidths below 1 tm and with a positional accuracy of less than 0.ljim on up to 3 in. diameter planar substrates. The measured wavefront error and diffraction efficiency of a directwrite two-phase-level F/10 lens confirm that high quality components can be fabricated quickly, easily, and at low cost.