论文信息 - Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures - 字舞流文

Properties of higher-order surface acoustic wave modes in Al1−xScxN/sapphire structures

O. Ambacher | A. Nair | A. Žukauskaitė | A. Ding | N. Feil | C. Sun | E. Mayer | B. Christian | S. Mihalic | M. Kessel