Novel MOEMS-based beam steering method

This paper proposes a novel Micro-Opto-Electro-Mechanical-System (MOEMS) based beam steering method mainly designed for far operating distance applications. The proposed system incorporates a MOEMS analog mirror developed by Texas Instruments Inc. as core component and a beam expanding telescope. The analog mirror can change angle within a ±5° range of mechanical rotation in two axes. The expanding telescope could reduce beam dispersion caused by diffraction of the mirror's boundary. Expressions of steering equation, steering range and angular resolution are deduced. Steering trace and far field steering beam patterns are simulated. Analyses on main performance of the system are proposed.

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