Specialized scatterometry methods for two types of gratings with distinct groove profiles
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[1] L. Johnson,et al. Evolution of grating profiles under ion-beam erosion. , 1979, Applied optics.
[2] Fred L. Terry,et al. Erratum to “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring” [Thin Solid Films 455–456 (2004) 828–836] , 2004 .
[3] Lijiang Zeng,et al. Fabrication of broadband, high-efficiency, metal-multilayer-dielectric gratings , 2014 .
[4] Ulrich Mantz,et al. Metrology of deep trench etched memory structures using 3D scatterometry , 2005, SPIE Advanced Lithography.
[5] J. Hazart,et al. Optical Fourier transform scatterometry for LER and LWR metrology , 2005, SPIE Advanced Lithography.
[6] Lijiang Zeng,et al. Scatterometry specialized for a highly asymmetric triangular grating on a transparent substrate. , 2014, Applied Optics.
[7] Christopher J. Raymond,et al. Applications of angular scatterometry for the measurement of multiply periodic features , 2003, SPIE Advanced Lithography.
[8] Hui Chen,et al. High-efficiency, broad-bandwidth metal/multilayer-dielectric gratings. , 2014, Optics letters.
[9] Gerard Mourou,et al. Compression of amplified chirped optical pulses , 1985 .
[10] Roger Lowe-Webb,et al. Novel diffraction-based spectroscopic method for overlay metrology , 2003, SPIE Advanced Lithography.