论文信息 - SiC Nitridation by NH3 Annealing and Its Effects in MOS Capacitors with Deposited SiO2 Films - 字舞流文

SiC Nitridation by NH3 Annealing and Its Effects in MOS Capacitors with Deposited SiO2 Films

A. Gobbi | F. Stedile | H. Boudinov | E. Pitthan | H. I. Boudinov | F. C. Stedile | H. Boudinov