论文信息 - Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films - 字舞流文

Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

S. Kucheyev | S. Falabella | L. B. Bayu Aji | S. Elhadj | A. Ceballos | A. Moore | J. Miller | C. Wasz | L. B. B. Aji