Effect of drain bias on negative gate bias and illumination stress induced degradation in amorphous InGaZnO thin-film transistors

The effect of drain bias on negative gate bias and illumination stress (NBIS) stability of a-IGZO TFTs was investigated. The evolutions of transfer curves were explored with NBIS time using current-voltage characteristics measurements. In the initial stage (<;1000 s) of NBIS with grounded VDS, transfer curves shifted negatively without subthreshold swing (S) degradation due to hole-trapping at the IGZO/gate insulator interface. On the other hand, on-current degradation occurred and was enhanced as NBIS duration increased. Results indicated that NBIS-induced defects were created above Fermi level energy (EF). NBIS-induced states creation was enhanced under NBIS with positive drain bias (VDS) of 40 V; however, it was found that NBIS-induced defects can be suppressed under negative VDS bias of -60 V.

[1]  Hideo Hosono,et al.  Subgap states in transparent amorphous oxide semiconductor, In–Ga–Zn–O, observed by bulk sensitive x-ray photoelectron spectroscopy , 2008 .

[2]  H. Ohta,et al.  Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors , 2004, Nature.

[3]  Yeon-Gon Mo,et al.  High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper , 2007 .

[4]  Shih-Ching Chen,et al.  Influence of positive bias stress on N2O plasma improved InGaZnO thin film transistor , 2010 .

[5]  Chaoyang Li,et al.  Bottom-Gate Zinc Oxide Thin-Film Transistors (ZnO TFTs) for AM-LCDs , 2008, IEEE Transactions on Electron Devices.

[6]  Ting‐Chang Chang,et al.  The asymmetrical degradation behavior on drain bias stress under illumination for InGaZnO thin film transistors , 2012 .

[7]  Sang Yeol Lee,et al.  Origin of threshold voltage shift by interfacial trap density in amorphous InGaZnO thin film transistor under temperature induced stress , 2011 .

[8]  Jang-Yeon Kwon,et al.  The effect of moisture on the photon-enhanced negative bias thermal instability in Ga-In-Zn-O thin film transistors , 2009 .

[9]  Sung-Min Yoon,et al.  Photon-accelerated negative bias instability involving subgap states creation in amorphous In–Ga–Zn–O thin film transistor , 2010 .

[10]  M. Mativenga,et al.  Increase of interface and bulk density of states in amorphous-indium-gallium-zinc-oxide thin-film transistors with negative-bias-under-illumination-stress time , 2012 .

[11]  M. Nakata,et al.  Dual-Gate Characteristics of Amorphous $ \hbox{InGaZnO}_{4}$ Thin-Film Transistors as Compared to Those of Hydrogenated Amorphous Silicon Thin-Film Transistors , 2009, IEEE Transactions on Electron Devices.

[12]  T. Kamiya,et al.  High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering , 2006 .

[13]  H. Ohta,et al.  Amorphous Oxide Semiconductors for High-Performance Flexible Thin-Film Transistors , 2006 .

[14]  Tien-Yu Hsieh,et al.  Investigation of the gate-bias induced instability for InGaZnO TFTs under dark and light illumination , 2011 .

[15]  Hideo Hosono,et al.  Origins of threshold voltage shifts in room-temperature deposited and annealed a-In–Ga–Zn–O thin-film transistors , 2009 .

[16]  Y. Chiu,et al.  Photoelectric heat effect induce instability on the negative bias temperature illumination stress for InGaZnO thin film transistors , 2012 .

[17]  D. Schroder Semiconductor Material and Device Characterization , 1990 .

[18]  Youn-Gyoung Chang,et al.  DC Versus Pulse-Type Negative Bias Stress Effects on the Instability of Amorphous InGaZnO Transistors Under Light Illumination , 2011, IEEE Electron Device Letters.

[19]  T. Kamiya,et al.  Photovoltaic properties of n-type amorphous In–Ga–Zn–O and p-type single crystal Si heterojunction solar cells: Effects of Ga content , 2012 .

[20]  Jung Woo Kim,et al.  Bottom-Gate Gallium Indium Zinc Oxide Thin-Film Transistor Array for High-Resolution AMOLED Display , 2008, IEEE Electron Device Letters.

[21]  Chi-Sun Hwang,et al.  Comparative Study on Light-Induced Bias Stress Instability of IGZO Transistors With $\hbox{SiN}_{x}$ and $ \hbox{SiO}_{2}$ Gate Dielectrics , 2010, IEEE Electron Device Letters.

[22]  Sung-Min Yoon,et al.  Transition of dominant instability mechanism depending on negative gate bias under illumination in amorphous In-Ga-Zn-O thin film transistor , 2011 .

[23]  T. Kamiya,et al.  Highly stable amorphous In-Ga-Zn-O thin-film transistors produced by eliminating deep subgap defects , 2011 .

[24]  John F. Muth,et al.  Bias stress stability of indium gallium zinc oxide channel based transparent thin film transistors , 2008 .

[25]  M. Nakata,et al.  Temperature-Dependent Transfer Characteristics of Amorphous InGaZnO4 Thin-Film Transistors , 2009 .

[26]  S. Yamazaki,et al.  Temperature Dependence of Transistor Characteristics and Electronic Structure for Amorphous In–Ga–Zn-Oxide Thin Film Transistor , 2010 .