论文信息 - Fabrication and experiment of a planar micro ion drag pump

Fabrication and experiment of a planar micro ion drag pump

A micro ion drag pump with planar electrodes on a glass substrate is fabricated and tested. The pump consists of a planar electrode pair array driven by DC voltage using unipolar conduction. Ethyl alcohol is pumped in both directions, and the flow rate and the pressure are measured in channels of depth 100 μm or 200 μm and width fixed at 3 mm. It is found that the pump can be fabricated easily and at a lower cost than the micro ion drag pumps previously investigated.

Yong-Kweon Kim | Si Hong Ahn

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