Optical Modulation by Controlling the Charge State of Deep Impurity Levels

[1]  Martin A. Green,et al.  Efficiency improvements of silicon solar cells by the impurity photovoltaic effect , 1994 .

[2]  J. Rosamilia,et al.  Etching of Silicon by the RCA Standard Clean 1 , 1999 .

[3]  R. Newman Optical Properties of Indium-Doped Silicon , 1955 .

[4]  Jean-Marc Halbout,et al.  Modulators at 1.3 pm Based on Free-Carrier Absorption , 1991 .

[5]  Stephen J. Fonash,et al.  太阳电池器件物理 = Solar cell device physics , 1982 .

[6]  Jicheng Zhou,et al.  Numerical simulation of the impurity photovoltaic effect in silicon solar cells doped with thallium , 2010 .

[7]  Rudi Santbergen,et al.  Optical absorption factor of solar cells for PVT systems , 2008 .

[8]  David J. Lockwood,et al.  Silicon Photonics: CMOS Going Optical [Scanning the Issue] , 2009 .

[9]  H. Kasai,et al.  Impurity photovoltaic effect in crystalline silicon solar cells , 1997, Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997.

[10]  Nahum Izhaky,et al.  High-speed optical modulation based on carrier depletion in a silicon waveguide. , 2007, Optics express.

[11]  A. Knights,et al.  Silicon Photonics: An Introduction , 2004 .

[12]  Robert Hull,et al.  Properties of Crystalline Silicon , 1999 .

[13]  David J. Thomson,et al.  Silicon optical modulators , 2010 .

[14]  W. Read,et al.  Statistics of the Recombinations of Holes and Electrons , 1952 .

[15]  Siegfried Janz,et al.  Silicon waveguide modulator based on carrier depletion in periodically interleaved PN junctions. , 2009, Optics express.

[16]  D. B. Lee Anisotropic Etching of Silicon , 1969 .

[17]  Numerical simulation of the impurity photovoltaic effect in silicon solar cells , 2008 .

[18]  Donald L. Lee,et al.  Electromagnetic Principles of Integrated Optics , 1986 .

[19]  H. Card,et al.  Limitation to Shockley–Read–Hall model due to direct photoionization of the defect states , 1989 .

[20]  A. Vonsovici,et al.  The single-mode condition for semiconductor rib waveguides with large cross section , 1998 .

[21]  B. Streetman Solid state electronic devices , 1972 .

[22]  M. Green Intrinsic concentration, effective densities of states, and effective mass in silicon , 1990 .

[23]  Keigo Iizuka,et al.  Elements of Photonics, Volume II , 2002 .

[24]  Alexander Fang,et al.  An all-silicon Raman laser , 2005, Nature.

[25]  Study for improvement of solar cell efficiency by impurity photovoltaic effect , 1997 .

[26]  Jamie D. Phillips,et al.  Model for intermediate band solar cells incorporating carrier transport and recombination , 2009 .

[27]  J. Nishizawa,et al.  Anomalous Diffusion of Phosphorus into Silicon , 1970 .

[28]  S. Pantelides The electronic structure of impurities and other point defects in semiconductors , 1978 .

[29]  S. Spector,et al.  Silicon waveguide sidewall smoothing by wet chemical oxidation , 2005, Journal of Lightwave Technology.

[30]  N. Islam,et al.  On the possibility of improving silicon solar cell efficiency through impurity photovoltaic effect and compensation , 2010 .

[31]  K. Okamoto Fundamentals of Optical Waveguides , 2000 .

[32]  M. Green,et al.  Optical properties of intrinsic silicon at 300 K , 1995 .

[33]  Graham T. Reed,et al.  Evolution of optical modulation using majority carrier plasma dispersion effect in SOI , 2008, SPIE OPTO.

[34]  D. Logan,et al.  The effect of doping type and concentration on optical absorption via implantation induced defects in silicon-on-insulator waveguides , 2008, 2008 Conference on Optoelectronic and Microelectronic Materials and Devices.

[35]  J. Nevin,et al.  Thallium‐doped silicon ionization and excitation levels by infrared absorption , 1975 .

[36]  Masashi Uematsu,et al.  Simulation of boron, phosphorus, and arsenic diffusion in silicon based on an integrated diffusion model, and the anomalous phosphorus diffusion mechanism , 1997 .

[37]  R. Soref,et al.  Large single-mode rib waveguides in GeSi-Si and Si-on-SiO/sub 2/ , 1991 .

[38]  Bahram Jalali Silicon-on-insulator photonic integrated circuit (SOI-PIC) technology , 1997, Photonics West.

[39]  Joseph L. Schmit,et al.  Infrared excitation spectrum of thallium‐doped silicon , 1978 .

[40]  Bahram Jalali,et al.  Can silicon change photonics? , 2008 .

[41]  Masanori Koshiba,et al.  Optical Waveguide Analysis , 1992 .

[42]  P. Yeh,et al.  Photonics : optical electronics in modern communications , 2006 .

[43]  J. Corelli,et al.  Infrared Spectroscopy of Divacancy-Associated Radiation-Induced Absorption Bands in Silicon , 1972 .

[44]  B. Jalali,et al.  Silicon Photonics , 2006, Journal of Lightwave Technology.

[45]  Graham T. Reed,et al.  Low-loss, single-model optical phase modulator in SIMOX material , 1994 .

[46]  P. Griffin,et al.  Point defects and dopant diffusion in silicon , 1989 .

[47]  P. Sewell,et al.  The single-mode condition for silicon-on-insulator optical rib waveguides with large cross section , 2004, Journal of Lightwave Technology.

[48]  Oded Cohen,et al.  Fast silicon optical modulator , 2004, SPIE OPTO.

[49]  S. Solmi,et al.  Aluminum-silicon ohmic contact on “shallow” n+p junctions☆ , 1980 .

[50]  Joseph T. Boyd,et al.  Measurement of mode field profiles and bending and transition losses in curved optical channel waveguides , 1997 .

[51]  Paul Crozat,et al.  Recent Progress in High-Speed Silicon-Based Optical Modulators , 2009, Proceedings of the IEEE.

[52]  J. Ziegler,et al.  SRIM – The stopping and range of ions in matter (2010) , 2010 .

[53]  J. Nelson The physics of solar cells , 2003 .

[54]  T. S. Navruz,et al.  Efficiency variation of the intermediate band solar cell due to the overlap between absorption coefficients , 2008 .

[55]  R. Hall Electron-Hole Recombination in Germanium , 1952 .

[56]  P. Yeh,et al.  Optical Waves in Layered Media , 1988 .

[57]  A. Heuberger,et al.  Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers , 1990 .

[58]  Matthew N. O. Sadiku,et al.  Elements of Electromagnetics , 1989 .

[59]  G. Kovacs,et al.  Bulk micromachining of silicon , 1998, Proc. IEEE.

[60]  D. Schroder Semiconductor Material and Device Characterization , 1990 .

[62]  Urs Fischer,et al.  Comparison of optical waveguide losses in silicon-on-insulator , 1993 .

[63]  G. Burbach,et al.  Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator , 1991 .

[64]  K. Ng,et al.  The Physics of Semiconductor Devices , 2019, Springer Proceedings in Physics.

[65]  D. Logan,et al.  Optical modulation in silicon waveguides via charge state control of deep levels. , 2009, Optics express.

[66]  M. Teich,et al.  Fundamentals of Photonics , 1991 .

[67]  Vladimir Stojanovic,et al.  Silicon photonics for compact, energy-efficient interconnects [Invited] , 2007, Journal of Optical Networking.

[68]  M. Lipson Guiding, modulating, and emitting light on Silicon-challenges and opportunities , 2005, Journal of Lightwave Technology.

[69]  Robert G. Hunsperger,et al.  Integrated optics, theory and technology , 1982 .

[70]  C. E. Png,et al.  A sub-micron depletion-type photonic modulator in Silicon On Insulator. , 2005, Optics express.

[71]  S. Jones Diffusion in Silicon , 2008 .

[72]  M. Fox Optical Properties of Solids , 2010 .

[73]  Richard A. Soref,et al.  Kramers-Kronig Analysis Of Electro-Optical Switching In Silicon , 1987, Other Conferences.

[74]  F. Gan,et al.  Design of all-optical switches based on carrier injection in Si/SiO/sub 2/ split-ridge waveguides (SRWs) , 2006, Journal of Lightwave Technology.

[75]  Juthika Basak,et al.  Developments in Gigascale Silicon Optical Modulators Using Free Carrier Dispersion Mechanisms , 2008 .

[76]  E. A. J. Marcatili,et al.  Dielectric rectangular waveguide and directional coupler for integrated optics , 1969 .

[77]  Juthika Basak,et al.  Recent development in a high-speed silicon optical modulator based on reverse-biased pn diode in a silicon waveguide , 2008 .

[78]  S. D. Brotherton,et al.  The energy level of thallium in silicon , 1978 .

[79]  Graham T. Reed,et al.  Silicon-on-insulator optical rib waveguide loss and mode characteristics , 1994 .

[80]  M. Wolf Limitations and possibilities for improvements of photovoltaic solar energy converters , 1960 .

[81]  D. Marcuse Light transmission optics , 1972 .

[82]  Richard A. Soref,et al.  Silicon-based optoelectronics , 1993, Proc. IEEE.

[83]  H. Kasai,et al.  Optical Absorption Properties of Indium-Doped Thin Crystalline Silicon Films , 1998 .

[84]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .

[85]  M. Green Solar Cells : Operating Principles, Technology and System Applications , 1981 .

[86]  M. Schmeits,et al.  Impurity photovoltaic effect in c-Si solar cells. A numerical study , 1999 .

[87]  H. Nishihara Optical integrated circuits , 1989 .

[88]  Mao-Teng Hsu,et al.  Silicon p-i-n optical waveguide modulators fabricated on the silicon and silicon-on-insulator substrates , 2007, SPIE OPTO.

[89]  Timo Aalto,et al.  Development of silicon-on-insulator waveguide technology , 2004, SPIE OPTO.

[90]  O. Powell,et al.  Single-mode condition for silicon rib waveguides , 2002 .

[91]  M. Watts,et al.  Low-Voltage, Compact, Depletion-Mode, Silicon Mach–Zehnder Modulator , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[92]  U. Hilleringmann,et al.  Optoelectronic system integration on silicon: waveguides, photodetectors, and VLSI CMOS circuits on one chip , 1995 .

[93]  Wilfried van Sark,et al.  Teaching the relation between solar cell efficiency and annual energy yield , 2007 .

[94]  T. Baba,et al.  Propagation Characteristics of Ultrahigh-Δ Optical Waveguide on Silicon-on-Insulator Substrate , 2001 .

[95]  P. Würfel,et al.  Limiting efficiency for solar cells with defects from a three-level model , 1993 .

[96]  G. G. Shahidi SOI technology for the GHz era , 2002, IBM J. Res. Dev..

[97]  B. Richter,et al.  Comparison of three transmission methods for integrated optical waveguide propagation loss measurement , 1993 .

[98]  Robert W. Dutton,et al.  On models of phosphorus diffusion in silicon , 1983 .

[99]  R. Alferness,et al.  Guided-wave optoelectronics , 1988 .

[100]  Shyh Wang,et al.  Fundamentals of semiconductor theory and device physics , 1989 .

[101]  K Petermann PROPERTIES OF OPTICAL RIB-GUIDES WITH LARGE CROSS-SECTION. , 1976 .

[102]  J. Michel,et al.  High-performance Ge-on-Si photodetectors , 2010 .

[103]  K. Kawano,et al.  Introduction to Optical Waveguide Analysis , 2001 .

[104]  Patrick Jaenen,et al.  Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire Waveguides , 2006 .

[105]  Amnon Yariv,et al.  Optical Waves in Crystals: Propagation and Control of Laser Radiation , 1983 .

[106]  H. Henderson,et al.  A negative resistance diode based upon double injection in thallium-doped silicon , 1969 .

[107]  O. Powell,et al.  Anisotropic etching of {100} and {110} planes in (100) silicon , 2001 .

[108]  P. Rai-Choudhury,et al.  MEMS and MOEMS Technology and Applications , 2000 .

[109]  Richard A. Soref,et al.  Silicon photonics technology: past, present, and future , 2005, SPIE OPTO.

[110]  J. Pate Introduction to Optics , 1937, Nature.