Electromechanical coupling efficiency of transverse vibration in piezoelectric plates according to electrode configuration

This study proposes a method of configuring electrodes for piezoelectric plates to improve the electromechanical coupling efficiency of transverse (out-of-plane) vibration. Two optical techniques were employed to investigate the transverse vibration. We first used a non-contact, full-field measurement technique called amplitude-fluctuation electronic speckle pattern interferometry (AF-ESPI) to determine resonant frequencies and mode shapes in real time. Second, a point-wise measurement device called a laser Doppler vibrometer was used to obtain the spectrum for out-of-plane frequencies. Four electrode configurations with completely free boundary conditions were used to study the electromechanical coupling efficiency of piezoelectric plates. We conclude that the design of the electrodes clearly influences the electromechanical coupling efficiency of piezoelectric plates. The experimental results related to resonant frequency and mode shape were verified using the finite element method (FEM). The numerical calculations are in good agreement with experimental results. Furthermore, according to FEM results, the distribution of electric potential gradient is similar to the mode shape measured by AF-ESPI, making it applicable to the configuration of electrodes in optimizing the excitation of piezoelectric plates. This study proposes the determination of the electromechanical coupling factor to predict the efficiency of transverse vibration in piezoelectric plates.

[1]  J. N. Butters,et al.  Speckle pattern and holographic techniques in engineering metrology , 1971 .

[2]  Sheng-Chih Shen,et al.  Design and Fabrication of a High-Power Eyeball-Like Microactuator Using a Symmetric Piezoelectric Pusher Element , 2010, Journal of Microelectromechanical Systems.

[3]  Analysis of the natural vibrations of circular piezoceramic plates with partial electrodes , 2001 .

[4]  Chien-Ching Ma,et al.  The influence of electrode designs on the resonant vibrations for square piezoceramic plates , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[5]  R. Holland,et al.  Contour extensional resonant properties of rectangular piezoelectric plates , 1968 .

[6]  R Bechmann,et al.  Piezoelectric Behaviour of Partially Plated Square Plates Vibrating in Contour Modes , 1951 .

[7]  Chien-Ching Ma,et al.  Experimental Measurement and Numerical Analysis on Resonant Characteristics of Cantilever Plates for Piezoceramic Bimorphs , 2007, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[8]  Wei-Chung Wang,et al.  Vibration measurement by the time-averaged electronic speckle pattern interferometry methods. , 1996, Applied optics.

[9]  Chien-Ching Ma,et al.  Mode excitation efficiency for contour vibrations of piezoelectric resonators , 2011, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[10]  Chien-Ching Ma,et al.  Forced vibration analysis of piezoelectric quartz plates in resonance , 2009 .

[11]  Chi-Hung Huang.  Theoretical and experimental vibration analysis for a piezoceramic disk partially covered with electrodes , 2005 .

[12]  J. T. Stewart,et al.  Thickness-shear mode shapes and mass-frequency influence surface of a circular and electroded AT-cut quartz resonator , 1991, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[13]  Chien-Ching Ma,et al.  Experimental measurement and numerical analysis on resonant characteristics of piezoelectric disks with partial electrode designs , 2004, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[14]  The dependence of the electromechanical coupling coefficient of piezoelectric elements on the position and size of the electrodes , 2001 .

[15]  Wen-Jong Wu,et al.  A High Performance Doppler Interferometer for Advanced Optical Storage Systems , 1999 .

[16]  J. Détaint,et al.  Energy trapping resonators and integrated filters using the AT cut of quartz like materials , 1992, Proceedings of the 1992 IEEE Frequency Control Symposium.

[17]  Hsien-Yang Lin,et al.  Vibration analysis of piezoelectric materials by optical methods , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[18]  R Bechmann,et al.  Contour Modes of Square Plates excited Piezoelectrically and Determination of Elastic and Piezoelectric Coefficients , 1951 .

[19]  P. Vigoureux.  Piezoelectricity An Introduction to the Theory and Applications of Electromechanical Phenomena in Crystals , 1947, Nature.