Design of lossless anchors for microacoustic-wave resonators utilizing phononic crystal strips

In micromechanical acoustic-wave resonators, energy dissipation through the anchors into the substrates may result in a low quality (Q) factor. To eliminate the ill effect of anchor losses, a design of lossless anchor based on phononic crystal (PC) strips for the microacoustic-wave resonators is presented. PC strips with acoustic forbidden bands are introduced to suppress the anchor loss and to serve as the suspensions for bar-type resonators. Numerical analysis shows that the acoustic energy leak can be effectively suppressed and the stored energy inside the resonators can be enhanced. A high-Q resonator with minimized anchor loss is expected.

[1]  Manoj Pandey,et al.  Analysis of Entrainment and Clamping Loss in an Optically Actuated MEMS , 2007 .

[2]  M. Pandey,et al.  Reducing Anchor Loss in MEMS Resonators Using Mesa Isolation , 2009, Journal of Microelectromechanical Systems.

[3]  C. Nguyen.  MEMS technology for timing and frequency control , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[4]  Z. Hou,et al.  Plate-mode waves in phononic crystal thin slabs: mode conversion. , 2008, Physical review. E, Statistical, nonlinear, and soft matter physics.

[5]  S Mohammadi,et al.  Complete band gaps in two-dimensional phononic crystal slabs. , 2006, Physical review. E, Statistical, nonlinear, and soft matter physics.

[6]  Chuanzeng Zhang,et al.  Effects of material parameters on elastic band gaps of two-dimensional solid phononic crystals , 2009 .

[7]  Ali Adibi,et al.  High-Q micromechanical resonators in a two-dimensional phononic crystal slab , 2009 .

[8]  Yong-Hwa Park,et al.  High-fidelity modeling of MEMS resonators. Part II. Coupled beam-substrate dynamics and validation , 2004, Journal of Microelectromechanical Systems.

[9]  Tsung-Tsong Wu,et al.  Efficient formulation for band-structure calculations of two-dimensional phononic-crystal plates , 2006 .

[10]  Wei-Cheng Lien,et al.  AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices , 2010 .

[11]  Yu Wang,et al.  Surface chemical control of mechanical energy losses in micromachined silicon structures , 2003 .

[12]  Yukihiro Tanaka,et al.  Surface acoustic waves in two-dimensional periodic elastic structures , 1998 .

[13]  J. Hsu,et al.  Acoustic band gaps in phononic crystal strip waveguides , 2010 .

[14]  I. E. Psarobas,et al.  Absolute spectral gaps for infrared light and hypersound in three-dimensional metallodielectric phoxonic crystals , 2010 .

[15]  Ali Adibi,et al.  Evidence of large high frequency complete phononic band gaps in silicon phononic crystal plates , 2008 .

[16]  Mehmet F. Su,et al.  Phononic crystals operating in the gigahertz range with extremely wide band gaps , 2010 .

[17]  Tsung-Tsong Wu,et al.  Utilization of phononic-crystal reflective gratings in a layered surface acoustic wave device , 2009 .

[18]  A. Atalar,et al.  Reducing anchor loss in micromechanical extensional mode resonators , 2010, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[19]  Demeter G. Fertis,et al.  Mechanical And Structural Vibrations , 1995 .