Tailored Si3N4 Ceramic Substrates for CVD Diamond Coating

Abstract A review is presented of chemical vapour deposition (CVD) diamond coating of silicon nitride (Si3N4) materials. Microcrystalline and nanocrystalline diamond films were grown using microwave plasma (MPCVD) and hot filament (HFCVD) reactors, respectively. Scanning electron and atomic force microscopy, μ-Raman spectroscopy, low incident angle and classical X-ray diffraction, acoustic emission assisted Brale indentation and thermal conductivity measurements were employed for the full characterisation of the diamond/ Si3N4 system. Using these techniques, the nucleation and growth stages as a function of substrate composition and surface pretreatment were characterised, as well as the diamond quality, the existence of residual stresses and the adhesion between the diamond film and the substrate. Based on this study, a tailored material was developed and tested in the machining of hardmetal workpieces with encouraging results.

[1]  Rui F. Silva,et al.  Low incident angle and classical x-ray diffraction analysis of residual stresses in diamond coated Si3N4 , 2003 .

[2]  H. Kuzmany,et al.  Evidence for trans-polyacetylene in nanocrystalline diamond films from H–D isotropic substitution experiments , 2003 .

[3]  Rui F. Silva,et al.  Surface Pretreatments of Silicon Nitride for CVD Diamond Deposition , 2003 .

[4]  Rui F. Silva,et al.  Adhesion behaviour assessment on diamond coated silicon nitride by acoustic emission , 2003 .

[5]  E. Cappelli,et al.  Diamond nucleation and adhesion on sintered nitride ceramics , 2002 .

[6]  M. Wong,et al.  Substrate bias effect on the formation of nanocrystalline diamond films by microwave plasma-enhanced chemical vapor deposition , 2002 .

[7]  Rui F. Silva,et al.  Thermal conductivity enhancement in cutting tools by chemical vapor deposition diamond coating , 2002 .

[8]  Rui F. Silva,et al.  Effect of intergranular phase of Si3N4 substrates on MPCVD diamond deposition , 2002 .

[9]  K. Hassouni,et al.  CVD diamond films: from growth to applications , 2001 .

[10]  R. Komanduri,et al.  Low pressure microwave plasma assisted chemical vapor deposition (MPCVD) of diamond coatings on silicon nitride cutting tools , 2001 .

[11]  Rui F. Silva,et al.  Influence of SiC particle addition on the nucleation density and adhesion strength of MPCVD diamond coatings on Si3N4 substrates , 2000 .

[12]  H. Iwahara,et al.  Adhesion improvement of diamond coating on silicon nitride substrate , 1999 .

[13]  D. Gruen,et al.  Control of diamond film microstructure by Ar additions to CH4/H2 microwave plasmas , 1998 .

[14]  M. Takaya,et al.  Effects of substrate pretreatments on diamond synthesis for Si3N4 based ceramics , 1998 .

[15]  V. Sarin,et al.  Nucleation and growth of combustion flame deposited diamond on silicon nitride , 1998 .

[16]  H. Ren,et al.  Nucleation and early growth of CVD diamond on silicon nitride , 1998 .

[17]  P. K. Mehrotra,et al.  Applications of Ceramic Cutting Tools , 1997 .

[18]  H. Ren,et al.  Optimization of MW-PACVD diamond deposition parameters for high nucleation density and growth rate on Si3N4 substrate , 1997 .

[19]  H. Iwahara,et al.  Improvement of Cutting Performance of Silicon Nitride Tool by Adherent Coating of Thick Diamond Film , 1997 .

[20]  H. Iwahara,et al.  Adherent Diamond Coating on Silicon Nitride Substrate , 1996 .

[21]  H. Li,et al.  Characterization and adhesion strength of diamond films deposited on silicon nitride inserts by d.c. plasma jet chemical vapour deposition , 1995 .

[22]  E. N. Loubnin,et al.  Diamond deposition on steel with CVD tungsten intermediate layer , 1995 .

[23]  T. Fischer.  Friction and Wear of Ceramics , 1993 .

[24]  Steve Bull,et al.  Diamond for wear and corrosion applications , 1992 .

[25]  M. Guidoboni,et al.  Effects of surface treatment on the diamond deposition and performance of ceramic cutting tools , 1991 .

[26]  D. Wiechert,et al.  Diamond Thin Films: Preparation, Characterization and Selected Applications Progress Report , 1991 .

[27]  Delbert E. Day,et al.  Glass Properties in the Yttria‐Alumina‐Silica System , 1987 .

[28]  J. Heinrich,et al.  Relationships between processing, microstructure and properties of dense and reaction-bonded silicon nitride , 1987 .

[29]  Donald H. Buckley,et al.  Friction and wear of ceramics , 1984 .

[30]  D. Hasselman,et al.  Effect of Crystallization of the Grain‐Boundary Phase on the Thermal Diffusivity of a Sialon Ceramic , 1984 .