论文信息 - Three Dimensional Monte Carlo Simulation Of Ion Implantation With Octree Based Point Location - 字舞流文

Three Dimensional Monte Carlo Simulation Of Ion Implantation With Octree Based Point Location

Siegfried Selberherr | H. Stippel | S. Selberherr | H. Stippel

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[3] M. Giles,et al. Two‐Dimensional Ion Implantation Profiles from One‐Dimensional Projections , 1985 .