论文信息 - A numerical method for stress analysis in a SAW resonator

A numerical method for stress analysis in a SAW resonator

We present an analytical method of stress and strain in a SAW resonator. This can calculate the absolute values of the stress and strain at each precise point over the resonator for any driving condition and frequency. To represent the SAW resonator, we use the Mason's equivalent circuit model which has mechanical ports and electrical ports. The acoustic voltage; Vm and current; Im of the mechanical port at the observation point are obtained as a function of the F-matrices and the electrical driving condition as well as driving frequency. Vm and Im are related to all mechanical components and their absolute values of propagating SAW by Partial Wave Theory. Applying this method, we discuss the stress analysis of SAW resonator filters on several substrates. Driving frequency dependency on stress migration is also discussed.

Y. Ebata | S. Mitobe

[1] M.M. Salomaa,et al. Investigations on the power tolerance of ladder impedance-element SAW filters , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[2] Y. Ebata,et al. A LiTaO 3 SAW Resonator and Its Application to Video Cassette Recorder , 1981 .

[3] T. Kobayashi,et al. Al electrodes fabrication technology for high-frequency and high-power durable SAW devices , 1990, IEEE Symposium on Ultrasonics.

[4] Sakurai Atsushi,et al. Epitaxially Grown Aluminum Film on Rotated Y-Cut Lithium Niobate for High-Power Surface Acoustic Wave Devices. , 1994 .

[5] Shigefumi Morishita,et al. Metal‐migration of aluminum film on SAW resonator , 1984 .

[6] Yasuo Ebata,et al. Suppression of bulk-scattering loss in SAW resonator with quasi-constant acoustic reflection periodicity , 1988, IEEE 1988 Ultrasonics Symposium Proceedings..

[7] R. Weigel,et al. Energy distribution in a quartz resonator , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[8] W. Shreve,et al. Improved metallization for surface acoustic wave devices , 1979 .

[9] Osamu Ikata,et al. Improvement in power durability of SAW filters , 1995, 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium.

[10] J.J. Campbell,et al. A method for estimating optimal crystal cuts and propagation directions for excitation of piezoelectric surface waves , 1968, IEEE Transactions on Sonics and Ultrasonics.