论文信息 - Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave technique - 字舞流文

Thermal diffusivity in amorphous silicon carbon nitride thin films by the traveling wave technique

K. H. Chen | P. Hess | S. Chattopadhyay | J. S. Wu | Yungting Chen | C. Wu | Li-Chyong Chen | G. Lehmann | Li‐Chyong Chen