The optimized SMA micro pump chip applicable to liquids and gases

We fabricated a high performance micro pump chip with optimized design. This chip can flow not only liquids but also gases (12 µ/min., 25 kPa for water. 11 µ/min., 5 kPa for air). Moreover, the micro pump is tolerant of gas bubbles in the liquid chamber and it is possible to prime itself. To achieve this performance, the micro pump improved three elements. The first one is eliminating pressure loss of the check valves. The second one is optimizing flow pattern inside the deformable chamber. And the third one is increasing compression ratio of the deformable chamber. Our original 3D micro fabrication process named “Hybrid IH process (micro stereo lithography)” to hybridize various micro parts (silicone rubbers, SMA actuators etc.) with UV-polymer structure was utilized for chip fabrication. Therefore, their packaging without leakage was made successfully.

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