论文信息 - Condensation coefficients in plasma sputtering deposition

Condensation coefficients in plasma sputtering deposition

Optical emission spectroscopy and Rutherford backscattering spectrometry are combined to determine condensation coefficients for plasma sputtering deposition. The method is applied for palladium deposition onto various substrates and condensation coefficients are found to lie between 0.4 and 0.9.

P. Brault | A. Thomann | Jean-Philippe Rozenbaum

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