In‐line RF‐MEMS series switches for reconfigurable antenna applications

The air bridged RF-MEMS capacitive series switches in single pole single throw transmission lines for reconfigurable antenna applications are presented. The RF characteristics of capacitive series switches are analyzed, measured, and compared with microstripline and coplanar-waveguide, which are generally used for transmission lines of MEMS reconfigurable circuits. RF-MEMS series switches are fabricated in both transmission lines on a glass substrate (er = 7.4 and tan δ = 0.001). The reconfigurable beam steering spiral antenna (fo = 11 GHz), which is monolithic integrated with RF-MEMS capacitive series switches on the same glass substrate, is also presented as an example of the use of in-line capacitive series switches. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 3130–3134, 2007; Published online in Wiley Inter-Science (www.interscience.wiley.com). DOI 10.1002/mop.22971