Room‐Temperature Micropillar Growth of Lithium–Titanate–Carbon Composite Structures by Self‐Biased Direct Current Magnetron Sputtering for Lithium Ion Microbatteries
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Tanja Kallio | Kai Arstila | Timo Sajavaara | Ulf Helmersson | Jari Koskinen | T. Sajavaara | T. Kallio | J. Etula | A. Iyer | J. Koskinen | U. Helmersson | K. Arstila | N. Wester | Niklas Wester | Katja Lahtinen | Jarkko Etula | Katja Lahtinen | Ajai Iyer
[1] J. Thornton. High Rate Thick Film Growth , 1977 .
[2] Royce W Murray,et al. Nanoelectrochemistry: metal nanoparticles, nanoelectrodes, and nanopores. , 2008, Chemical reviews.
[3] S. Buddhudu,et al. Analysis of structural and thermal properties of Li2TiO3 ceramic powders , 2011 .
[4] M. Ferenets,et al. Thin Solid Films , 2010 .
[5] F. Berkemeier,et al. Lithium diffusion in sputter-deposited Li4Ti5O12 thin films , 2012 .
[6] Wei Quan,et al. Lithium titanate hydrates with superfast and stable cycling in lithium ion batteries , 2017, Nature Communications.
[7] Francesco De Angelis,et al. Review on recent progress of nanostructured anode materials for Li-ion batteries , 2014 .
[8] Yaron Paz,et al. Self-assembled monolayers and titanium dioxide: From surface patterning to potential applications , 2011, Beilstein journal of nanotechnology.
[9] R. K. Waits. Planar magnetron sputtering , 1978 .
[10] E. Pohjalainen,et al. Comparative study of carbon free and carbon containing Li4Ti5O12 electrodes , 2015 .
[11] Bo Liu,et al. Lithium and lithium ion batteries for applications in microelectronic devices: A review , 2015 .
[12] R. Basu,et al. Synthesis of nanocrystalline Li4Ti5O12 by a novel aqueous combustion technique , 2009 .
[13] F. Lévy,et al. Energy distribution of ions bombarding TiO2 thin films during sputter deposition , 2001 .
[14] J. Bates,et al. Raman and Infrared Spectral Studies of Anhydrous Li2CO3 and Na2CO3 , 1971 .
[15] L. Kavan,et al. Electrochemical properties of spinel Li4Ti5O12 nanoparticles prepared via a low-temperature solid route , 2016, Journal of Solid State Electrochemistry.
[16] R. Seisyan. Nanolithography in microelectronics: A review , 2011 .
[17] T. Laurila,et al. Effect of Power Density on the Electrochemical Properties of Undoped Amorphous Carbon (a‐C) Thin Films , 2019, Electroanalysis.
[18] G. Watson,et al. GGA+U description of lithium intercalation into anatase TiO2 , 2010 .
[19] F. Hsu,et al. Preparation and Characterization of Thin Film Li4Ti5O12 Electrodes by Magnetron Sputtering , 2005 .
[20] J. Alami,et al. Measurement of the magnetic field change in a pulsed high current magnetron discharge , 2004 .
[21] D. Wexler,et al. Amorphous Carbon Coated High Grain Boundary Density Dual Phase Li4Ti5O12‐TiO2: A Nanocomposite Anode Material for Li‐Ion Batteries , 2011 .
[22] J. Pereira‐Ramos,et al. Investigation of lithium diffusion in nano-sized rutile TiO2 by impedance spectroscopy , 2010 .
[23] Joseph Wang. Nanomaterial-based electrochemical biosensors. , 2005, The Analyst.
[24] Y. Huttel,et al. Generation of nanoparticles with adjustable size and controlled stoichiometry: recent advances. , 2012, Langmuir : the ACS journal of surfaces and colloids.
[25] Mingming Chen,et al. Carbon coating of Li4Ti5O12 using amphiphilic carbonaceous material for improvement of lithium-ion battery performance , 2012 .
[26] A. Anders. A structure zone diagram including plasma based deposition and ion etching - eScholarship , 2010 .
[27] J. D. Robertson,et al. Sputtering of lithium compounds for preparation of electrolyte thin films , 1992 .
[28] 友紀子 中川. SoC , 2021, Journal of Japan Society for Fuzzy Theory and Intelligent Informatics.
[29] Y. Wang,et al. Solid-state synthesis of submicron-sized Li4Ti5O12/Li2TiO3 composites with rich grain boundaries for lithium ion batteries , 2014 .
[30] Congxiao Wang,et al. Carbon-coated nano-sized Li4Ti5O12 nanoporous micro-sphere as anode material for high-rate lithium-ion batteries , 2011 .
[31] Qiuying Xia,et al. Black mesoporous Li4Ti5O12−δ nanowall arrays with improved rate performance as advanced 3D anodes for microbatteries , 2016 .
[32] T. Arizumi,et al. Ultrafine powders of TiN and AlN produced by a reactive gas evaporation technique with electron beam heating , 1982 .
[33] M. Chakraborty,et al. Substrate bias voltage and deposition temperature dependence on properties of rf-magnetron sputtered titanium films on silicon (100) , 2014, Bulletin of Materials Science.
[34] J. Robertson,et al. Interpretation of Raman spectra of disordered and amorphous carbon , 2000 .
[35] R. Boyd,et al. The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering , 2016 .
[36] T. Sajavaara,et al. Time-of-flight - Energy spectrometer for elemental depth profiling - Jyväskylä design , 2014 .
[37] Mikko Laitinen,et al. Potku - New analysis software for heavy ion elastic recoil detection analysis , 2014 .
[38] D. Kellerman,et al. Structure peculiarities of carbon-coated lithium titanate: Raman spectroscopy and electron microscopic study , 2012 .
[39] Guohong Ma,et al. Raman study of phase transformation of TiO2 rutile single crystal irradiated by infrared femtosecond laser , 2007 .
[40] Alina Matei,et al. FTIR Spectroscopy for Carbon Family Study , 2016, Critical reviews in analytical chemistry.
[41] A. Jankowski,et al. Sputter deposition of a spongelike morphology in metal coatings , 2003 .
[42] A. Riahi,et al. Electrochemical cycling behaviour of lithium carbonate (Li2CO3) pre-treated graphite anodes – SEI formation and graphite damage mechanisms , 2014 .
[43] J. Lewis,et al. 3D Printing of Interdigitated Li‐Ion Microbattery Architectures , 2013, Advanced materials.
[44] T. Laurila,et al. Application-Specific Catalyst Layers: Pt-Containing Carbon Nanofibers for Hydrogen Peroxide Detection , 2017, ACS omega.
[45] Tsutomu Ohzuku,et al. Zero‐Strain Insertion Material of Li [ Li1 / 3Ti5 / 3 ] O 4 for Rechargeable Lithium Cells , 1995 .
[46] John Robertson,et al. Resonant Raman spectroscopy of disordered, amorphous, and diamondlike carbon , 2001 .
[47] Aaron Peled,et al. Synthesis of nanoparticles in the gas phase for electronic, optical and magnetic applications—a review , 1998 .
[48] H. Kleykamp,et al. Phase equilibria in the Li–Ti–O system and physical properties of Li2TiO3 , 2002 .
[49] X. Sun,et al. Stability of Li2CO3 in cathode of lithium ion battery and its influence on electrochemical performance , 2016 .
[50] P. S. Mcleod,et al. High‐rate sputtering of aluminum for metallization of integrated circuits , 1977 .
[51] Torsten Brezesinski,et al. Ordered Large-Pore Mesoporous Li4Ti5O12 Spinel Thin Film Electrodes with Nanocrystalline Framework for High Rate Rechargeable Lithium Batteries: Relationships among Charge Storage, Electrical Conductivity, and Nanoscale Structure , 2011 .
[52] B. Cuenya. Synthesis and catalytic properties of metal nanoparticles: Size, shape, support, composition, and oxidation state effects , 2010 .
[53] Phl Peter Notten,et al. All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts , 2011 .
[54] Peng Jiang,et al. Large-scale assembly of colloidal nanoparticles and fabrication of periodic subwavelength structures , 2008, Nanotechnology.
[55] Dawei Liu,et al. Engineering nanostructured electrodes and fabrication of film electrodes for efficient lithium ion intercalation , 2010 .
[56] P. Kelly,et al. Magnetron sputtering: a review of recent developments and applications , 2000 .
[57] P. Pasierb,et al. Structural properties of Li2CO3–BaCO3 system derived from IR and Raman spectroscopy , 2001 .
[58] S. Uhlenbruck,et al. Three-Dimensional, Fibrous Lithium Iron Phosphate Structures Deposited by Magnetron Sputtering. , 2015, ACS applied materials & interfaces.
[59] G. Mannino,et al. Multi-Scale-Porosity TiO2 scaffolds grown by innovative sputtering methods for high throughput hybrid photovoltaics , 2016, Scientific Reports.
[60] N. A. Kyeremateng. Self‐Organised TiO2 Nanotubes for 2D or 3D Li‐Ion Microbatteries , 2014 .