Novel H-beam electrothermal actuators with capability of generating bi-directional static displacement

A new H-beam electrothermal microactuator is proposed for providing bi-directional static displacement. The design concept and preliminary experimental results of H-beam actuators are presented in this paper. Due to its symmetric structural design, this H-beam actuator can avoid the influence from rotational torques during its bi-directional dynamic and static movement. The restoring force generated by cold beam of H-beam actuator potentially renders this new actuator capability of faster returning speed than conventional electrothermal actuator designs. H-beam actuator is able to generate 50 μm static stroke under 0.9 W electrical dc load. This H-beam electrothermal actuator is well functioned and exhibits good characteristics with high-level performance for industrial applications.

[1]  W. Häberle,et al.  The "millipede" - nanotechnology entering data storage , 2002 .

[2]  N. D. Rooij,et al.  Micro-opto-mechanical 2/spl times/2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation , 1999 .

[3]  P. Zavracky,et al.  Micromechanical switches fabricated using nickel surface micromachining , 1997 .

[4]  Chengkuo Lee,et al.  Development of X-beam electrothermal actuators , 2005 .

[5]  Norman C. Tien,et al.  A micromachined RF microrelay with electrothermal actuation , 2003 .

[6]  Wensyang Hsu,et al.  An electro-thermally and laterally driven polysilicon microactuator , 1997 .

[7]  Y. Gianchandani,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a Micromachined 2d Positioner with Electrothermal Actuation and Sub-nanometer Capacitive Sensing , 2022 .

[8]  Y. Gianchandani,et al.  Bent-beam electro-thermal actuators for high force applications , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[9]  Hiroyuki Fujita,et al.  A MEMS piggyback actuator for hard-disk drives , 2002 .

[10]  D. L. DeVoe.  Thermal issues in MEMS and microscale systems , 2002 .

[11]  Kwang-Cheol Lee,et al.  Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication , 2004 .

[12]  Yong-Kweon Kim,et al.  Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage , 2003 .

[13]  C. Marxer,et al.  Micro-opto-mechanical 2 x 2 switch for single mode fiber based on plasma-etched silicon mirror and electrostatic actuator , 1997 .

[14]  Toshiki Hirano,et al.  MEMS milliactuator for hard-disk-drive tracking servo , 1998 .

[15]  Oliver Brand,et al.  Fully integrated magnetically actuated micromachined relays , 1998 .

[16]  P. Lerch,et al.  Modelization and characterization of asymmetrical thermal micro-actuators , 1996 .

[17]  Chengkuo Lee,et al.  Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators , 2004 .

[18]  Chengkuo Lee,et al.  Study of electrothermal V-beam actuators and latched mechanism for optical switch , 2005 .