论文信息 - Self-aligned cobalt disilicide for gate and interconnection and contacts to shallow junctions - 字舞流文

Self-aligned cobalt disilicide for gate and interconnection and contacts to shallow junctions

E. J. Lloyd | S. Murarka | H. Levinstein | S. Hillenius | A. K. Sinha | D. Fraser | R. Liu | D.S. Williams