Silicon micromachined two-dimensional galvano optical scanner

A new two-dimensional galvano optical scanner realized by silicon micromachining is proposed. To realize two-dimensional operation a silicon micromachined gimbal structure was introduced. It is possible to sense rotational angle using electromagnetic coupling between driving coil and fixed detecting coil. >

[1]  W. Benecke,et al.  Electromagnetic microactuators with multiple degrees of freedom , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[2]  T. R. Christenson,et al.  Design and testing of planar magnetic micromotors fabricated by deep x ray lithography and electroplating , 1993 .

[3]  M. Allen,et al.  A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[4]  M. Esashi,et al.  Vacuum packaging for microsensors by glass-silicon anodic bonding , 1994 .

[5]  Chih-Ming Ho,et al.  Surface micromachined magnetic actuators , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[6]  Hiroki Kuwano,et al.  Electromagetically driven microvalve , 1995 .