Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMS
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Roger T. Howe | Roya Maboudian | Carlo Carraro | C. O. Lee | W. Robert Ashurst | R. Howe | R. Maboudian | C. Carraro | W. R. Ashurst | C Yau | G. Jonathan Kluth | Christina Yau | G. Kluth | Christina O. Lee
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