Effect of helium on spatial plasma parameters in low pressure argon-helium plasma

Spatial distributions of the electron energy probability function were measured using a Langmuir probe in side-type argon-helium inductively coupled plasma. Collisional dominated electron heating and a concave shape of plasma density profile were observed at 10 mTorr pure argon. As the helium proportion increased, the electron heating and density profile changed to collisionless dominated heating and a convex shape respectively, and the same tendency was shown when the pressure decreased in the pure argon plasma. These changes were due to the decrease in the e-n collision frequency and the expansion of the electron power dissipation region.

[1]  J. Bang,et al.  Electron energy flux control using dual power in side-type inductively coupled plasma , 2011 .

[2]  J. Bang,et al.  A numerical method for determining highly precise electron energy distribution functions from Langmuir probe characteristics , 2010 .

[3]  E. Scime,et al.  Ion acceleration in Ar–Xe and Ar–He plasmas. I. Electron energy distribution functions and ion composition , 2010 .

[4]  G. Yeom,et al.  Plasma Characteristics of 450 mm Diameter Ferrite-Enhanced Inductively Coupled Plasma Source , 2010 .

[5]  C. Chung,et al.  Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas , 2010 .

[6]  J. Bang,et al.  Experimental investigation of the Boltzmann relation for a bi-Maxwellian distribution in inductively coupled plasmas , 2009 .

[7]  U. Czarnetzki,et al.  Neutral gas depletion mechanisms in dense low-temperature argon plasmas , 2008 .

[8]  C. Chung,et al.  Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing , 2008 .

[9]  M. Shimada,et al.  Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma , 2007 .

[10]  A. Kudryavtsev,et al.  Nonlocal effects in a bounded low-temperature plasma with fast electrons , 2006 .

[11]  A. Lichtenberg,et al.  Principles of Plasma Discharges and Materials Processing: Lieberman/Plasma 2e , 2005 .

[12]  H. Uhm,et al.  Electron temperature analysis of two-gas-species inductively coupled plasma , 2001 .

[13]  M. Schmidt,et al.  Plasma generation and plasma sources , 2000 .

[14]  S. S. Kim,et al.  Evolution of the electron energy distribution function in a planar inductive argon discharge , 2000 .

[15]  Vladimir Kolobov,et al.  EFFECT OF COLLISIONLESS HEATING ON ELECTRON ENERGY DISTRIBUTION IN AN INDUCTIVELY COUPLED PLASMA , 1998 .

[16]  J. E. Chilton,et al.  Measurement of electron-impact excitation into the 3 p 5 4 p levels of argon using Fourier-transform spectroscopy , 1998 .

[17]  Uwe R. Kortshagen,et al.  On simplifying approaches to the solution of the Boltzmann equation in spatially inhomogeneous plasmas , 1996 .

[18]  V. Godyak,et al.  Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge , 1993 .

[19]  L. Alves,et al.  Electron kinetics in weakly ionized helium under DC and HF applied electric fields , 1991 .

[20]  J. Ajello,et al.  Study of electron impact excitation of argon in the extreme ultraviolet : emission cross section of resonance lines of Ar I, Ar II , 1990 .

[21]  J. Boeuf,et al.  A Monte Carlo analysis of an electron swarm in a nonuniform field: the cathode region of a glow discharge in helium , 1982 .

[22]  J. McConkey,et al.  Excitation of the resonance lines of Ar by electrons , 1973 .