Tailoring microplasma nanofabrication: from nanostructures to nanoarchitectures

An innovative approach to fabricate tailored Mo-oxide nanostructures and composite nanoarchitectures using atmospheric microplasmas sustained in a gap between a Mo wire and a Si substrate is reported. It is shown that at smaller gap distances spherical nanoparticles are produced whereas sheet-like structures emerge when the gap is increased. When the wire is consumed continuously, it is possible to synthesize complex nanoarchitectures made of nanoparticles decorated with nanosheets. These processes can be applied for other metal and metal oxide materials and suggest a way to improve control and predictability, common problems in high-yield nanofabrication.

[1]  Igor Levchenko,et al.  Nanostructures of various dimensionalities from plasma and neutral fluxes , 2007 .

[2]  Igor Levchenko,et al.  Deterministic shape control in plasma-aided nanotip assembly , 2006 .

[3]  Michael Keidar,et al.  Factors affecting synthesis of single wall carbon nanotubes in arc discharge , 2007 .

[4]  Karl H. Schoenbach,et al.  Microplasmas and applications , 2006 .

[5]  Anthony B. Murphy,et al.  Plasma-deposited Ge nanoisland films on Si: is Stranski–Krastanow fragmentation unavoidable? , 2008 .

[6]  Miran Mozetic,et al.  Nanowire sensor response to reactive gas environment , 2008 .

[7]  D. Mariotti Nonequilibrium and effect of gas mixtures in an atmospheric microplasma , 2008, 1003.2714.

[8]  Davide Mariotti,et al.  Self-organized nanostructures on atmospheric microplasma exposed surfaces , 2007 .

[9]  Kostya Ostrikov,et al.  Colloquium: Reactive plasmas as a versatile nanofabrication tool , 2005 .

[10]  E. Williams,et al.  Barriers to shape evolution of supported nano-crystallites , 2005 .

[11]  Henrik Lindström,et al.  Monoclinic β-MoO(3) nanosheets produced by atmospheric microplasma: application to lithium-ion batteries. , 2008, Nanotechnology.

[12]  Enhancement of visible photoluminescence in the SiNx films by SiO2 buffer and annealing , 2006 .

[13]  Wei Zhou,et al.  Low temperature deposition of nanocrystalline TiO2 films: enhancement of nanocrystal formation by energetic particle bombardment , 2007 .

[14]  N. Koshizaki,et al.  Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing , 2006 .

[15]  Kostya Ostrikov,et al.  Plasma-aided nanofabrication: where is the cutting edge? , 2007 .

[16]  Debra R Rolison,et al.  Catalytic Nanoarchitectures--the Importance of Nothing and the Unimportance of Periodicity , 2003, Science.