Multilayer optics for an extreme-ultraviolet lithography tool with 70-nm resolution
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Regina Soufli | Stanley Mrowka | Claude Montcalm | Eric M. Gullikson | Henry N. Chapman | Christopher C. Walton | Eberhard A. Spiller | Mark A. Schmidt | Sherry L. Baker | John S. Taylor | Courtney Davidson | R. Fred Grabner | Benjamin B. Kaufmann | Russell M. Hudyma | James A. Folta | H. Chapman | E. Spiller | E. Gullikson | C. Walton | R. Soufli | J. Folta | R. Hudyma | C. Montcalm | S. Mrowka | B. Kaufmann | S. Baker | R. Grabner | M. Schmidt | John S. Taylor | C. Davidson
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