Complex optical interference filters with stress compensation for space applications

We present hereafter a study of complex bandpass optical interference filters with central wavelengths ranging in blue region or in the near infrared. For these applications, the required functions are particularly complex as they must present a very narrow bandwidth as well as a high level of rejection over a broad spectral range. Moreover, these components must have a good flatness meaning that the stress induced by the different layers has to be taken in account in the filter design. We present a thorough study of these filters including their design, fabrication using Plasma Assisted Reactive Magnetron Sputtering (PARMS) and characterization. Excellent agreement between experimental and theoretical spectral performances associated with a final sag of 326 and 13 nm, and uniformity from −0.05 to 0.10 and −0.10 to 0.20% are demonstrated for the two manufactured filters.

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