Study of thermomechanical properties of Si∕SiGe superlattices using femtosecond transient thermoreflectance technique

Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and allows us to determine the cross-plan thermal conductivity of the superlattices at room temperature. We also show that, from the experimental curve, we can extract the thickness of the metallic film, the longitudinal sound velocity and the refractive index of the superlattice using acoustic echoes and Brillouin oscillation data.

[1]  H. Maris,et al.  Electron diffusion in metals studied by picosecond ultrasonics. , 1994, Physical review. B, Condensed matter.

[2]  Thomsen,et al.  Surface generation and detection of phonons by picosecond light pulses. , 1986, Physical review. B, Condensed matter.

[3]  D. Paul.  Si/SiGe heterostructures: from material and physics to devices and circuits , 2004 .

[4]  Rama Venkatasubramanian,et al.  Thermal conductivity of Si–Ge superlattices , 1997 .

[5]  H. Maris,et al.  Kapitza conductance and heat flow between solids at temperatures from 50 to 300 K. , 1993, Physical review. B, Condensed matter.

[6]  Ali Shakouri,et al.  Thermal conductivity of Si/SiGe and SiGe/SiGe superlattices , 2002 .

[7]  E. Palik.  Handbook of Optical Constants of Solids , 1997 .

[8]  O. Heavens.  Handbook of Optical Constants of Solids II , 1992 .

[9]  D. Maillet,et al.  Thermal Quadrupoles: Solving the Heat Equation through Integral Transforms , 2000 .

[10]  R. Peierls,et al.  Zur kinetischen Theorie der Wärmeleitung in Kristallen , 1929 .

[11]  Kang L. Wang,et al.  Thermal conductivity of symmetrically strained Si/Ge superlattices , 2000 .

[12]  B. Bonello,et al.  Elastic properties of ultrathin permalloy/alumina multilayer films using picosecond ultrasonics and brillouin light scattering , 2004 .

[13]  J. C. Jaeger,et al.  Conduction of Heat in Solids , 1952 .

[14]  R. Venkatasubramanian.  Lattice thermal conductivity reduction and phonon localizationlike behavior in superlattice structures , 2000 .

[15]  K. Goodson,et al.  Thermal characterization of Bi2Te3/Sb2Te3 superlattices , 2001 .

[16]  John D. Dow,et al.  Thermal conductivity of superlattices , 1982 .

[17]  M. Cardona,et al.  THERMAL-CONDUCTIVITY MEASUREMENTS OF GAAS/ALAS SUPERLATTICES USING A PICOSECOND OPTICAL PUMP-AND-PROBE TECHNIQUE , 1999 .

[18]  Gang Chen,et al.  Thermal conductivity and ballistic-phonon transport in the cross-plane direction of superlattices , 1998 .