X-ray diffraction in multilayers

Abstract Diffraction of X-rays in multilayer systems such as the molecular and the evaporated/sputtered multi-layers have been studied based upon the optics of thin films. General solutions for the intensity profiles of x-ray diffraction from multi-layers of finite thickness have been obtained for angles of incidence outside the total reflection region. It is also shown that the optical expression for diffraction in the x-ray region by periodic systems agree with the conventional crystal diffraction theories.