论文信息 - Structural and electrical properties of AlN layers grown on silicon by reactive RF magnetron sputtering - 字舞流文

Structural and electrical properties of AlN layers grown on silicon by reactive RF magnetron sputtering

O. Vyvenko | V. Mikhailovskii | E. Ubyivovk | Y. Petrov | N. Pilipenko | I. Kotina | V. Zharinov | N. Bazlov