Epitaxial Growth of Thick 4H-SiC Layers with a Reduced Micropipe Density in a Vertical Hot-Wall Reactor
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Kunikazu Izumi | Hidekazu Tsuchida | Isaho Kamata | Syunsuke Izumi | Takeshi Tawara | H. Tsuchida | I. Kamata | K. Izumi | T. Tawara | Syunsuke Izumi