Stretchable pumps for soft machines

Machines made of soft materials bridge life sciences and engineering1. Advances in soft materials have led to skin-like sensors and muscle-like actuators for soft robots and wearable devices1–3. Flexible or stretchable counterparts of most key mechatronic components have been developed4,5, principally using fluidically driven systems6–8; other reported mechanisms include electrostatic9–12, stimuli-responsive gels13,14 and thermally responsive materials such as liquid metals15–17 and shape-memory polymers18. Despite the widespread use of fluidic actuation, there have been few soft counterparts of pumps or compressors, limiting the portability and autonomy of soft machines4,8. Here we describe a class of soft-matter bidirectional pumps based on charge-injection electrohydrodynamics19. These solid-state pumps are flexible, stretchable, modular, scalable, quiet and rapid. By integrating the pump into a glove, we demonstrate wearable active thermal management. Embedding the pump in an inflatable structure produces a self-contained fluidic ‘muscle’. The stretchable pumps have potential uses in wearable laboratory-on-a-chip and microfluidic sensors, thermally active clothing and autonomous soft robots.A stretchable polymer pump that uses electric fields to accelerate ions in dielectric liquids can generate flow even when bent into different conformations, offering applications in soft robotics.

[1]  Paul Kawun,et al.  A thin PDMS nozzle/diffuser micropump for biomedical applications , 2016 .

[2]  Zongxia Jiao,et al.  Design, Analysis, and Verification of an Electro- Hydrostatic Actuator for Distributed Actuation System , 2020, Sensors.

[3]  Carmel Majidi,et al.  Visually Imperceptible Liquid-Metal Circuits for Transparent, Stretchable Electronics with Direct Laser Writing. , 2018, Advanced materials.

[4]  S. Yokota,et al.  MEMS-based tube-type micropump by using electro-conjugated fluid (ECF) , 2012, The XIX International Conference on Electrical Machines - ICEM 2010.

[5]  D. Floreano,et al.  Soft Robotic Grippers , 2018, Advanced materials.

[6]  Mi-Ching Tsai,et al.  A stand-alone peristaltic micropump based on piezoelectric actuation , 2007, Biomedical microdevices.

[7]  I. Park,et al.  Stretchable, Skin‐Mountable, and Wearable Strain Sensors and Their Potential Applications: A Review , 2016 .

[8]  Ok Chan Jeong,et al.  Fabrication of a peristaltic PDMS micropump , 2005 .

[9]  J. Darabi,et al.  Development of an electrohydrodynamic injection micropump and its potential application in pumping fluids in cryogenic cooling systems , 2005, Journal of Microelectromechanical Systems.

[10]  H. Shea,et al.  Flexible and stretchable electrodes for dielectric elastomer actuators , 2012, Applied Physics A.

[11]  G. Stemme,et al.  Micromachined flat-walled valveless diffuser pumps , 1997 .

[12]  Robert J. Wood,et al.  An integrated design and fabrication strategy for entirely soft, autonomous robots , 2016, Nature.

[13]  A. K. Agarwal,et al.  Adaptive liquid microlenses activated by stimuli-responsive hydrogels , 2006, Nature.

[14]  Majid Ashouri,et al.  Theoretical and experimental studies of a magnetically actuated valveless micropump , 2016 .

[15]  Jan Vanfleteren,et al.  Fabrication of an implantable stretchable electro-osmosis pump , 2011, MOEMS-MEMS.

[16]  D. Rus,et al.  Design, fabrication and control of soft robots , 2015, Nature.

[17]  Yafeng Guan,et al.  Fabrication and characterization of a multi-stage electroosmotic pump for liquid delivery , 2005 .

[18]  Wendelin J. Stark,et al.  Design, Performance and Reinforcement of Bearing-Free Soft Silicone Combustion-Driven Pumps , 2014 .

[19]  Stephen A. Morin,et al.  Soft Robotics: Review of Fluid‐Driven Intrinsically Soft Devices; Manufacturing, Sensing, Control, and Applications in Human‐Robot Interaction   , 2017 .

[20]  Samuel Rosset,et al.  Small, fast, and tough: Shrinking down integrated elastomer transducers , 2016 .

[21]  M. Richter,et al.  A bidirectional silicon micropump , 1995 .

[22]  O. Jeong,et al.  A phase-change type micropump with aluminum flap valves , 2003 .

[23]  Juan G. Santiago,et al.  A planar electroosmotic micropump , 2002 .

[24]  H. Shea,et al.  Flexible Active Skin: Large Reconfigurable Arrays of Individually Addressed Shape Memory Polymer Actuators , 2017 .

[25]  Jung-Yeul Jung,et al.  Fabrication and testing of bubble powered micropumps using embedded microheater , 2007 .

[26]  S. Ng,et al.  Plug-and-play microvalve and micropump for rapid integration with microfluidic chips , 2015 .

[27]  N. F. de Rooij,et al.  Magnetohydrodynamic pumping in nuclear magnetic resonance environments , 2007 .

[28]  Shane K. Mitchell,et al.  Hydraulically amplified self-healing electrostatic actuators with muscle-like performance , 2018, Science.

[29]  Samuel Rosset,et al.  Peta-pico-Voltron: An open-source high voltage power supply , 2018, HardwareX.

[30]  O. Velev,et al.  Remotely powered self-propelling particles and micropumps based on miniature diodes. , 2007, Nature materials.

[31]  Sanlin S. Robinson,et al.  Poroelastic Foams for Simple Fabrication of Complex Soft Robots , 2015, Advanced materials.

[32]  H. Shea,et al.  Fabrication Process of Silicone-based Dielectric Elastomer Actuators , 2016, Journal of visualized experiments : JoVE.

[33]  Daniel P. Armstrong,et al.  Stretchable Capacitive Sensors of Torsion, Strain, and Touch Using Double Helix Liquid Metal Fibers , 2017 .

[34]  Matteo Cianchetti,et al.  Soft robotics: Technologies and systems pushing the boundaries of robot abilities , 2016, Science Robotics.

[35]  D. Floreano,et al.  Versatile Soft Grippers with Intrinsic Electroadhesion Based on Multifunctional Polymer Actuators , 2016, Advanced materials.

[36]  Antonio Ramos,et al.  Electrokinetics and electrohydrodynamics in microsystems , 2011 .

[37]  Shoichi Iikura,et al.  Development of flexible microactuator and its applications to robotic mechanisms , 1991, Proceedings. 1991 IEEE International Conference on Robotics and Automation.

[38]  Shingo Maeda,et al.  Conduction Electrohydrodynamics with Mobile Electrodes: A Novel Actuation System for Untethered Robots , 2017, Advanced science.

[39]  K. Suzumori,et al.  A new mobile pressure control system for pneumatic actuators using reversible chemical reactions of water , 2013, 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[40]  T. Aida,et al.  Thermoresponsive actuation enabled by permittivity switching in an electrostatically anisotropic hydrogel. , 2015, Nature materials.

[41]  Kin Fong Lei,et al.  A vortex pump-based optically-transparent microfluidic platform for biotech and medical applications , 2007, Proceedings of the Institution of Mechanical Engineers. Part H, Journal of engineering in medicine.

[42]  Klaus Hofmann,et al.  A micromachined electrohydrodynamic (EHD) pump , 1991 .

[43]  Robert J. Wood,et al.  Pneumatic Energy Sources for Autonomous and Wearable Soft Robotics , 2014 .

[44]  R. Wood,et al.  A non-differential elastomer curvature sensor for softer-than-skin electronics , 2011 .

[45]  Yong-Kweon Kim,et al.  Fabrication and experiment of a planar micro ion drag pump , 1998 .

[46]  Choon Chiang Foo,et al.  Stretchable, Transparent, Ionic Conductors , 2013, Science.

[47]  Suresh V. Garimella,et al.  Recent advances in microscale pumping technologies: a review and evaluation , 2008 .

[48]  Robert J. Wood,et al.  A Soft Combustion-Driven Pump for Soft Robots , 2014 .

[49]  N. Kamamichi,et al.  Earthworm muscle driven bio-micropump , 2017 .

[50]  Lung-Ming Fu,et al.  Micropumps and biomedical applications – A review , 2018, Microelectronic Engineering.

[51]  M. Sitti,et al.  Soft Actuators for Small‐Scale Robotics , 2017, Advanced materials.

[52]  L. Beccai,et al.  Flexible Three‐Axial Force Sensor for Soft and Highly Sensitive Artificial Touch , 2014, Advanced materials.

[53]  Urmas Johanson,et al.  An All-Textile Non-muscular Biomimetic Actuator Based on Electrohydrodynamic Swelling , 2020, Frontiers in Bioengineering and Biotechnology.

[54]  J. Rossiter,et al.  Shape memory polymer hexachiral auxetic structures with tunable stiffness , 2014 .

[55]  J. Seyed-Yagoobi,et al.  Advances in electrohydrodynamic conduction pumping , 2009, IEEE Transactions on Dielectrics and Electrical Insulation.

[56]  Juan G. Santiago,et al.  A review of micropumps , 2004 .

[57]  J. Fluitman,et al.  A thermopneumatic micropump based on micro-engineering techniques , 1990 .