A 8.7ppm/°C, 694nW, One-Point Calibrated RC Oscillator using a Nonlinearity-Aware Dual Phase-Locked Loop and DSM-Controlled Frequency-Locked Loops

This paper presents an on-chip timer composed of two DSM-controlled RC oscillators, locked through a non-linearity aware digital dual phase-locked loop. The proposed design achieves an accurate temperature coefficient below 8.7ppm/°C from 10 samples from two different wafer lots with only one-point calibration and an Allan deviation floor of 4ppm. The power consumption is 694nW at 116kHz.