Chemical bond modification in porous SiOCH films by H2 and H2/N2 plasmas investigated by in situ infrared reflection absorption spectroscopy
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T. Ohiwa | I. Sakai | H. Hayashi | M. Hori | M. Sekine | Hiroshi M. Yamamoto | K. Takeda | H. Kondo | K. Ishikawa | K. Asano | H. Yamamoto