High-speed plasmonic Mach-Zehnder modulator in a waveguide

We demonstrate a plasmonic Mach-Zehnder-modulator with a record-small length of 10 μm. The modulator is fully integrated into a single silicon waveguide and operates at 72 Gbit s<sup>-1</sup>. A voltage-length product as low as V<sub>π</sub>L=50 ±5 Vpm is found.