Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication

Figure 1. SEM image of nanoarchitectures fabricated from strained Si/SiGe bi-layer films. (a) Nanorings with a thickness of 80 nm, radius of ~3.0 μm, and width of 3 μm; (b) nanodrill with a thickness of 110 nm, radius of ~2.4 μm, and width of 10 μm; and (c) nanocoil with a thickness of 110 nm, radius of ~2.4 μm, and width of 2 μm. In general, we can vary the thickness from 10 nm to 200 nm and dimensions from 20 nm to 100 μm. By Minghuang Huang, Carl Boone, Michelle Roberts, Don E. Savage, Max G. Lagally, Nakul Shaji, Hua Qin, Robert Blick, John A. Nairn and Feng Liu