Gas-phase Silicon Etching With Bromine Trifluoride

arrived after printing deadline. It is printed in its entirety at the end of Volume 2. 0-7803-3829-4/97/$10.00 0 1 997 IEEE 669 TRANSDUCERS '97 1997 International Conference on Solid-state Sensors and Actuators Chicago, June 16-19, 1997