A Review on Aerosol-Based Direct-Write and Its Applications for Microelectronics

Aerosol-based direct-write refers to the additive process of printing CAD/CAM features from an apparatus which creates a liquid or solid aerosol beam. Direct-write technologies are poised to become useful tools in the microelectronics industry for rapid prototyping of components such as interconnects, sensors, and thin film transistors (TFTs), with new applications for aerosol direct-write being rapidly conceived. This paper aims to review direct-write technologies, with an emphasis on aerosol-based systems. The different currently available state-of-the-art systems such as Aerosol Jet CAB-DW, MCS, and aerodynamic lenses are described. A review and analysis of the physics behind the fluid-particle interactions including Stokes and Saffman force, experimental observations, and how a full understanding of theory and experiments can lead to new technology are presented. Finally, the applications of aerosol direct-write for microelectronics are discussed.

[1]  A. Gomez,et al.  Visualization of aerodynamically focused subsonic aerosol jets , 1994 .

[2]  Gregory K. Loken,et al.  Capillary-based liquid microdroplet deposition , 2010 .

[3]  Y. Cheng,et al.  Properties of continuum source particle beams: II. Beams generated in capillary expansions , 1979 .

[4]  Marcus Maiwald,et al.  INKtelligent printed strain gauges , 2010 .

[5]  W. H. Walton.  The Mechanics of Aerosols , 1966 .

[6]  D. Ginley,et al.  Low-cost inorganic solar cells: from ink to printed device. , 2010, Chemical reviews.

[7]  J. W. Thomas,et al.  THEORY OF A DIFFUSION BATTERY , 1952 .

[8]  A. Wexler,et al.  HIGH-SPEED PARTICLE BEAM GENERATION: SIMPLE FOCUSING MECHANISMS , 1999 .

[10]  Magnus Berggren,et al.  Low‐Voltage Ring Oscillators Based on Polyelectrolyte‐Gated Polymer Thin‐Film Transistors , 2010, Advanced materials.

[11]  Pascual Riesco-Chueca,et al.  Aerodynamic focusing of particles in a carrier gas , 1988, Journal of Fluid Mechanics.

[12]  H. Dwyer,et al.  A sphere in shear flow at finite Reynolds number: effect of shear on particle lift, drag, and heat transfer , 1990, Journal of Fluid Mechanics.

[13]  Orven F. Swenson,et al.  Aerosol focusing in micro-capillaries: Theory and experiment , 2008 .

[14]  C. Davies,et al.  Definitive equations for the fluid resistance of spheres , 1945 .

[15]  Ashok Gidwani,et al.  Aerodynamic Focusing of Nanoparticles: II. Numerical Simulation of Particle Motion Through Aerodynamic Lenses , 2005 .

[16]  Inchul Kim,et al.  On the equation for spherical-particle motion: effect of Reynolds and acceleration numbers , 1998, Journal of Fluid Mechanics.

[17]  David B. Kittelson,et al.  Generating Particle Beams of Controlled Dimensions and Divergence: I. Theory of Particle Motion in Aerodynamic Lenses and Nozzle Expansions , 1995 .

[18]  J. Mora,et al.  Aerodynamic focusing of particles in viscous jets , 1993 .

[19]  Jiyoul Lee,et al.  Printable ion-gel gate dielectrics for low-voltage polymer thin-film transistors on plastic. , 2008, Nature materials.

[20]  Lejun Qi.  Aerosol printing of colloidal nanocrystals by aerodynamic focusing. , 2010 .

[21]  James Friend,et al.  Interfacial destabilization and atomization driven by surface acoustic waves , 2008 .

[22]  A. Osiptsov,et al.  Two-way coupling model for shock-induced laminar boundary-layer flows of a dusty gas , 2005 .

[23]  M. Knudsen,et al.  Luftwiderstand gegen die langsame Bewegung kleiner Kugeln , 1911 .

[24]  Hai Wang,et al.  Drag force, diffusion coefficient, and electric mobility of small particles. I. Theory applicable to the free-molecule regime. , 2003, Physical review. E, Statistical, nonlinear, and soft matter physics.

[25]  S. Loyalka,et al.  Cunningham correction factor and accommodation coefficient: Interpretation of Millikan's data , 1989 .

[26]  D. R. Oliver.  Influence of Particle Rotation on Radial Migration in the Poiseuille Flow of Suspensions , 1962, Nature.

[27]  M. Hörteis,et al.  Combining laser chemical processing and aerosol jet printing: a laboratory scale feasibility study , 2011 .

[28]  T. Higuchi,et al.  High Frequency Surface Acoustic Wave Atomizer , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[29]  J. S. Marshall,et al.  Discrete-element modeling of particulate aerosol flows , 2009, J. Comput. Phys..

[30]  D. Schulz,et al.  Collimated aerosol beam deposition: sub 5-μm resolution of printed actives and passives , 2008, 2008 Flexible Electronics and Displays Conference and Exhibition.

[31]  P. Mcmurry,et al.  Impact dynamics of colloidal quantum dot solids. , 2011, Langmuir : the ACS journal of surfaces and colloids.

[32]  John N. DuPont,et al.  Fabrication of functionally graded TiC/Ti composites by Laser Engineered Net Shaping , 2003 .

[33]  Joachim V. R. Heberlein,et al.  Focused nanoparticle-beam deposition of patterned microstructures , 2000 .

[34]  C. C. Hwang.  Initial stages of the interaction of a shock wave with a dust deposit , 1986 .

[35]  P. Verheijen,et al.  Some improvements on the particle beam generator , 1990 .

[36]  Stefan W. Glunz,et al.  Fine line printed silicon solar cells exceeding 20% efficiency , 2008 .

[37]  G. G. Stokes.  On the Effect of the Internal Friction of Fluids on the Motion of Pendulums , 2009 .

[38]  Nam Soo Kim,et al.  Future direction of direct writing , 2010 .

[39]  Wei Zhang,et al.  Printed, sub-3V digital circuits on plastic from aqueous carbon nanotube inks. , 2010, ACS nano.

[40]  D. Schulz,et al.  Aerosol flow through a micro-capillary , 2009 .

[41]  Elisabeth Guazzelli,et al.  Lateral Forces on a Sphere , 2004 .

[42]  I. Barton.  Computation of particle tracks over a backward-facing step , 1995 .

[43]  J. Friend,et al.  Microscale acoustofluidics: Microfluidics driven via acoustics and ultrasonics , 2011 .

[44]  O. Raabe,et al.  Re-evaluation of millikan's oil drop data for the motion of small particles in air , 1982 .

[45]  S. Friedlander,et al.  High-speed beams of small particles , 1967 .

[46]  David S. Ginley,et al.  Direct write metallization for photovoltaic cells and scaling thereof , 2010, 2010 35th IEEE Photovoltaic Specialists Conference.

[47]  Yu L. Song,et al.  Ultrasonic atomization using MHz silicon-based multiple-Fourier horn nozzles , 2006 .

[48]  Xuejun Lu,et al.  Aerosol-jet-printed, high-speed, flexible thin-film transistor made using single-walled carbon nanotube solution , 2010 .

[49]  Orven F. Swenson,et al.  Aerosol flow through a long micro-capillary: collimated aerosol beam , 2008 .

[50]  Peng Liu,et al.  Generating Particle Beams of Controlled Dimensions and Divergence: II. Experimental Evaluation of Particle Motion in Aerodynamic Lenses and Nozzle Expansions , 1995 .

[51]  Stefan W. Glunz,et al.  Metal aerosol jet printing for solar cell metallization , 2007 .

[52]  D. Vaselaar,et al.  Direct-Write Vapor Sensors on FR4 Plastic Substrates , 2007, IEEE Sensors Journal.

[53]  M. Sommerfeld,et al.  Multiphase Flows with Droplets and Particles , 2011 .

[54]  E. Cunningham.  On the Velocity of Steady Fall of Spherical Particles through Fluid Medium , 1910 .

[55]  P. Mcmurry,et al.  Micropattern Deposition of Colloidal Semiconductor Nanocrystals by Aerodynamic Focusing , 2010 .

[56]  J. McLaughlin.  Inertial migration of a small sphere in linear shear flows , 1991, Journal of Fluid Mechanics.

[57]  Y. Cheng,et al.  Similarity theory for aerosol beams , 1982 .

[58]  D. Schulz,et al.  Collimated Aerosol Beam Deposition: Sub-5-$\mu$m Resolution of Printed Actives and Passives , 2010, IEEE Transactions on Advanced Packaging.

[59]  Wallis S. Hamilton,et al.  Forces on a sphere accelerating in a viscous fluid , 1964, Journal of Fluid Mechanics.

[60]  Peter H. McMurry,et al.  A Design Tool for Aerodynamic Lens Systems , 2006 .

[61]  H. D. Wu,et al.  Direct writing of conformal mesoscopic electronic devices by MAPLE DW , 2000 .

[62]  Robert A. Millikan,et al.  Coefficients of Slip in Gases and the Law of Reflection of Molecules from the Surfaces of Solids and Liquids , 1923 .

[63]  D. J. Carlson,et al.  Particle drag and heat transfer in rocket nozzles , 1964 .

[64]  M.T. Reich,et al.  Rapid Prototyping RFID Antennas Using Direct-Write , 2009, IEEE Transactions on Advanced Packaging.

[65]  S. Downey,et al.  Single particle characterization by time-of-flight mass spectrometry , 1995 .

[66]  D. Schulz,et al.  CAB-DW™ for 5 µm trace-width deposition of solar cell metallization top-contacts , 2009, 2009 34th IEEE Photovoltaic Specialists Conference (PVSC).

[67]  G. Segré,et al.  Behaviour of macroscopic rigid spheres in Poiseuille flow Part 2. Experimental results and interpretation , 1962, Journal of Fluid Mechanics.

[68]  D. Schulz,et al.  Transforming a Laser Micromachiner into a Direct-Write Tool for Electronic Materials , 2008 .

[69]  Anatolii Papyrin,et al.  Cold Spray Technology , 2006 .

[70]  K. Squires,et al.  Large eddy simulation of turbulent gas-solid flows in a vertical channel and evaluation of second-order models , 1998 .

[71]  S. Friedlander,et al.  Characteristics of a capillary-generated particle beam , 1983 .

[72]  P. Saffman.  The lift on a small sphere in a slow shear flow , 1965, Journal of Fluid Mechanics.

[73]  S. Priya,et al.  Solution-based aerosol deposition process for synthesis of multilayer structures , 2011 .

[74]  R. Mei.  An approximate expression for the shear lift force on a spherical particle at finite reynolds number , 1992 .

[75]  Orven F. Swenson,et al.  Printed silicon as diode and FET materials – Preliminary results , 2008 .

[76]  M. P. Sinha,et al.  Particle analysis by mass spectrometry , 1982 .

[77]  Wei Zhang,et al.  Printed Sub‐2 V Gel‐Electrolyte‐Gated Polymer Transistors and Circuits , 2010 .

[78]  Ray T. Chen,et al.  All ink-jet-printed carbon nanotube thin-film transistor on a polyimide substrate with an ultrahigh operating frequency of over 5 GHz , 2008 .

[79]  S. Girshick.  Aerosol processing for nanomanufacturing , 2008 .

[80]  J. Ran,et al.  Numerical Simulation of the Particle Motion Characteristics in Boundary Layer of Gas-Solid Rotary Flow , 2006 .

[81]  Ian M. Hutchings,et al.  Direct Writing Technology Advances and Developments , 2008 .

[82]  Bruce H. King,et al.  Flow- and Laser-Guided Direct Write of Electronic and Biological Components , 2002 .

[83]  J. J. Stoffels.  A direct inlet for surface-ionization mass spectrometry of airborne particles , 1981 .