Silicon-on-insulator grating coupler with low back-reflection

We design and fabricate an efficient broadband grating coupler (GC) on a 400nm-thick silicon-on-insulator (SOI) wafer. The measured coupling loss is 2.7dB when coupling to a single-mode fiber (SMF) at 1310nm wavelength with TE polarization. 1dB-full-width and back-reflection are determined to be 30nm and −30dB, respectively.