재료 분석에서 전자 에너지 손실 스펙트럼 (EELS)의 원리 및 응용 연구

An electron energy loss spectroscopy (EELS) instrument attached on transmission electron microscopy (TEM) becomes a powerful and analytical tool for extracting the noble information of materials using the enhancement of TEM images, elemental analysis, elemental or chemical mapping images, electron energy loss near edge structure (ELNES), and extended energy-loss fine structure (EXELFS). In this review, the principle and applications of EELS which is widely used in material, life, and electronic sciences were introduced