Automated inspections for dimensional micro- and nanometrology

Abstract The large number of inspection features at dimensional measurements in the micro and nanorange requires a lossless information flow within the closed quality loop. Thereby the closed quality loop comprises CAD (Computer Aided Design) and CAQ (Computer Aided Quality) and is characterised by neutral interfaces. The state-of-the-art is represented by the recently accomplished adaptation of the closed quality loop [ G. Lins, S. Topfer, U. Nehse, Hard- and software interfaces enabling efficient inspection planning at the nano positioning and nano measuring machine, in: Proceedings of 10th IMEKO TC7 International Symposium on Advances of Measurement Science, June 30–July 2, vol. 2, Sankt Petersburg, Russia, 2004, pp. 376–381 ] to the nanomeasuring machine (NMM) [G. Jager, E. Manske, T. Hausotte, Nano Measuring Machine, Invited paper at MICRO.tec 2000 – VDE Microtechnologies World Congress, Hannover, Germany, September 2000]. The originality lies with a novel system-theoretical model of a measurements process with an intelligent, adaptive sensor as part of the closed quality loop. The model is discussed in detail. The necessity and the working principle of a cascaded sensor system are outlined. The application of each sub-sensor of the cascaded sensor system can be described by the system-theoretical model. The investigated principles are applicable to all micro and nanomeasuring machines turning them into efficiently operating micro or nanocoordinate measuring machines capable of performing automated inspections.

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