Design study of a high resolution soft X-ray monochromator with a movable variable groove density grating

Abstract We discuss the design and optimization of a fixed slit, single element spherical grating monochromator. A novel scheme utilizes the translation and rotation of a grating with a polynomial groove density variation. Optimization of the grating parameters minimizes the major aberration terms and linearizes the total energy resolution over the scan range. With a grating slope error of 0.2 the resolving power ranges from E / Δ E ≥ 10 4 to 5×10 3 over the energy range of 500 to 1100 eV.

[1]  T. Namioka,et al.  Theory of the Concave Grating. III. Seya-Namioka Monochromator*†‡ , 1959 .

[2]  T. Harada,et al.  Mechanically ruled aberration-corrected concave gratings. , 1980, Applied optics.

[3]  H. Petersen,et al.  The plane grating and elliptical mirror: A new optical configuration for monochromators , 1982 .

[4]  David E. Aspnes.  High-efficiency concave-grating monochromator with wavelength-independent focusing characteristics , 1982 .

[5]  In-focus monochromator: theory and experiment of a new grazing incidence mounting. , 1990, Applied optics.

[6]  R. Bachrach,et al.  The SSRL ultrahigh vacuum grazing incidence monochromator: Design considerations and operating experience , 1978 .

[7]  M. Howells,et al.  The study and design of a high transmission, high resolution toroidal grating monochromator for soft x-ray radiation , 1984 .

[8]  C. Kunz,et al.  A Grazing Incidence Vacuum Ultraviolet Monochromator with Fixed Exit Slit , 1972 .

[9]  D. Mancini,et al.  Evaluation of a new VUV/soft x‐ray toroidal grating monochromator with a movable exit slit , 1992 .

[10]  T. Harada,et al.  Mechanically Ruled Stigmatic Concave Gratings , 1975 .

[11]  Chunying Chen,et al.  Concept and design procedure for cylindrical element monochromators for synchrotron radiation , 1987 .

[12]  Michael C. Hettrick.  High resolution gratings for the soft X-ray , 1988 .

[13]  Wayne R. McKinney,et al.  Design Optimization of "Straight Groove" Toroidal Grating Monochromators for Synchrotron Radiation , 1980 .