Helium ion and fast atom scattering from polycrystalline copper surfaces

Low-energy ion scattering from surfaces is an established technique that gives unique information from the first one or two atomic layers on a surface. The standard technique employing an electostatic analyser, however, has some disadvantages. It detects only scattered ions whose yield from surfaces is relatively low and thus high incident ion fluxes must be used. A high flux of ions will change the nature of the surface in a number of ways. It will lead to significant preferential sputtering and to charging effects, particularly in insulating and semiconducting samples. It has been shown also that ions produce more chemical damage in surfaces that do neutrals of the same energy and species. Many of these disadvantages may be overcome if neutrals are used as the bombarding particles instead of ions. Conventional electrostatic methods cannot be employed to detect neutral sacttered spectra. Hence, a time-of-flight mass spectrometer with a pulsed ion/fast atom source (energy range 100–5000 eV) has been developed. This instrument has been used to measure the energy of particles scattered from a polycrystalline copper surface bombarded with either ions or fast atoms. In this study, spectra of He scattered from both ‘ion-cleaned’ and ‘ion-cleaned and heated’ copper surfaces were monitored for incident angles ranging from 5° to 75° with a constant scattering angle of 90°. For the ‘ion-cleaned’ surfaces, spectra of both ion and neutral projectiles show that the technique is sensitive to the outermost surface atomic layer, but that fast atom bombardment seems the more surface specific. For the ‘ion-cleaned and heated’ surface, spectra for both projectiles are qualitatively identical and first-order effects can be accounted for by the single binary collision model; however, small but significant differences in peak energy were observed and these may be explained in terms of inelastic collision processes.

[1]  S. Saied,et al.  Characterization of a commercial electron impact fast atom beam source , 1989 .

[2]  J. Sullivan,et al.  Design, construction and use of a fast atom scattering spectrometer , 1988 .

[3]  J. Sullivan,et al.  A comparison of ion and fast atom beam reduction in TiO2 , 1988 .

[4]  T. Fauster Surface geometry determination by large-angle ion scattering , 1988 .

[5]  J. Berg Neutral and ion beam SIMS of non-conducting materials , 1986 .

[6]  J. Vickerman,et al.  Static SIMS, FABMS and SIMS imaging in applied surface analysis , 1984 .

[7]  W. Baun Ion Scattering Spectrometry: A Versatile Technique for a Variety of Materials. , 1981 .

[8]  R. Bronckers,et al.  Shadowing, focussing and charge-exchange effects in the angular distributions of keV Ne+ and H2O+ ions scattered from Cu{110}: II. The surface geometry of the first two layers , 1981 .

[9]  R. Bronckers,et al.  Shadowing, focussing and charge exchange effects in the angular distributions of keV Ne and H2O ions scattered from Cu{110} , 1981 .

[10]  S. Luitjens,et al.  ARGON (10KEV) SCATTERED FROM STRUCTURES, INDUCED BY BOMBARDING A CU(100) SURFACE - IONIZATION AND NEUTRALIZATION , 1980 .

[11]  S. Luitjens,et al.  Interaction of low energy (5 10 keV) argon atoms and ions with a Cu(100) surface; Ion fraction, ionization and neutralization , 1980 .

[12]  S. Luitjens,et al.  Low energy (E0 < 10 keV) atom and ion scattering of neon from a Cu(100) surface; Ionization and neutralization , 1980 .

[13]  S. Luitjens,et al.  The measurement of energy spectra of neutral particles in low energy ion scattering , 1980 .

[14]  S. Luitjens,et al.  LOW-ENERGY (E0 LESS THAN 10 KEV) ATOM AND ION-SCATTERING OF NEON FROM A CU(100) SURFACE - IONIZATION AND NEUTRALIZATION , 1980 .

[15]  T. M. Buck,et al.  Low-energy neon-ion scattering and neutralization on first and second layers of a Ni(001) surface , 1979 .

[16]  T. Verbeek,et al.  A new method of studying surface structures , 1978 .

[17]  R. Kelly An attempt to understand preferential sputtering , 1978 .

[18]  E. Taglauer,et al.  Neutralization and Inelastic Energy Losses in Low Energy Ion Scattering , 1977 .

[19]  E. Taglauer,et al.  Multiple Scattering of Low Energy Rare Gas Ions: A Comparison of Experiment and Computer Simulation , 1976 .

[20]  B. Poelsema,et al.  CHARGE-EXCHANGE OF LOW-ENERGY HE IONS AND ATOMS SCATTERED FROM A COPPER SINGLE-CRYSTAL , 1976 .

[21]  Mark T. Robinson,et al.  Computer studies of the reflection of light ions from solids , 1976 .

[22]  B. Poelsema,et al.  SCATTERING OF LOW-ENERGY HELIUM IONS AND ATOMS FROM A COPPER SINGLE-CRYSTAL - ELASTIC AND INELASTIC EFFECTS , 1976 .

[23]  D. Smith,et al.  Oscillatory Cross Sections in Low-Energy Ion Scattering from Surfaces , 1975 .

[24]  T. M. Buck LOW-ENERGY ION SCATTERING SPECTROMETRY , 1975 .

[25]  A. Boers,et al.  Small angle multiple reflection of low energy (6keV) noble gas ions from single crystal surfaces as a means to study surface texture and contamination , 1972 .

[26]  D. Armour,et al.  REVIEW ARTICLE: Analysis of back scattered ions as a technique for the study of surfaces , 1972 .

[27]  David P. Smith Analysis of surface composition with low-energy backscattered ions , 1971 .

[28]  David P. Smith SCATTERING OF LOW-ENERGY NOBLE GAS IONS FROM METAL SURFACES. , 1967 .

[29]  J. Lindhard,et al.  ENERGY DISSIPATION BY IONS IN THE kev REGION , 1961 .

[30]  Homer D. Hagstrum,et al.  Theory of Auger Ejection of Electrons from Metals by Ions , 1954 .