论文信息 - On the influence of sputter etch cleaning on the silicidation, the thermal stability and the electrical characteristics of Ti/p−Si contacts - 字舞流文

On the influence of sputter etch cleaning on the silicidation, the thermal stability and the electrical characteristics of Ti/p−Si contacts

R. Schreutelkamp | R. L. Meirhaeghe | F. Cardon | W. Laflere | W. D. Bosscher | A. S. Vercaemst